Lithium niobate (LiNbO3, LN) is a multifunctional material with broad applicability in photonic and electronic devices. Recent advances in lithium niobate on insulator (LNOI) technology have significantly enhanced the integration density and miniaturization potential of LN-based platforms. Among the various fabrication techniques available, pulsed laser deposition (PLD) presents a cost-effective and versatile alternative to crystalline ion slicing (CIS), particularly advantageous for achieving high doping concentrations. However, a persistent challenge in PLD-grown lithium niobate film is cracking, primarily induced by the substantial thermal stress resulting from the mismatch in thermal expansion coefficients between LN and the substrate. In this study, we implemented a series of process modifications to address the cracking issue and successfully achieved crack-free LN films by introducing a lithium-deficient phase. This approach enabled the successful fabrication of highly Fe3+-doped LN films with a high electrical conductivity of 9.95 × 10−5 S/m while also exhibiting characteristic polarization switching behavior. These results demonstrate that PLD enables the fabrication of highly doped, structurally robust LN films and holds significant potential for the development of advanced electronic and optoelectronic devices.
Song et al. (Wed,) studied this question.
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