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Fast steering mirrors (FSMs) designed by the micro-electro-mechanical system (MEMS) technology are significantly smaller in volume and mass, offering distinct advantages. To improve their performance in the open-loop control mode, this study introduces a control algorithm and evaluates its performance on an electromagnetic-driven MEMS-FSM. The algorithm employs a method to shape the input signal by fitting the system's transfer function and modifying the step response. This shaped signal is then applied to the system to minimize overshoot, reduce settling time, and improve working bandwidth, thereby enabling faster angular adjustments and improving the stability of the FSM. The experimental results demonstrate an 85.65% reduction in overshoot and a decrease in settling time from 84 ms to 0.4 ms. Consequently, the working bandwidth of the FSM system increases to 2500 Hz, demonstrating the effectiveness of the algorithm in enhancing MEMS-FSM's performance.
Hou et al. (Sun,) studied this question.