What question did this study set out to answer?

The aim is to highlight the recent developments in MEMS and NEMS technologies and their applications.

February 5, 2026Open Access

Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition

ZDZhi-Xuan DaiNational Chung Hsing University TOTakahito OnoTohoku University CDChing-Liang Dai

Key Points

The aim is to highlight the recent developments in MEMS and NEMS technologies and their applications.
Review advancements in MEMS and NEMS technologies
Discuss applications in intelligent sensing
Analyze trends and future directions in the field
Identified rapid developments in MEMS and NEMS
Highlighted the significance of these devices in sensing applications
Outlined potential future advancements and challenges

Abstract

Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have experienced rapid and sustained development in recent years and have become key enabling technologies for intelligent sensing ...

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