Vanadium Oxide Films Prepared by Chemical Solution Deposition on Soda‐Lime Glass: Suppression of Na Diffusion From Soda‐Lime Glass With SiO 2 Interlayer

Vanadium oxide films are coated on a cost‐effective soda‐lime glass substrates by chemical solution deposition. When the vanadium oxide films are deposited directly on the soda‐lime glass substrates, alkali elements from the substrate diffuse into the film during heat treatment, posing a significant issue. To suppress this diffusion, a SiO 2 layer is introduced between the vanadium oxide film and the substrate. The SiO 2 layer, also formed by chemical solution deposition, effectively inhibits the migration of alkali elements from the substrate, resulting in the formation of a single‐phase VO 2 film. The resulting VO 2 film exhibits excellent electrical property.