This paper explores how the selection of materials affects the operation of microelectromechanical systems (MEMS), with a particular emphasis on ceramics, carbon-based materials, silicon, silicon-based materials, and polymers. Different material types offer unique benefits, affecting both performance and cost. The formulation of ingredients, analogous to a chemical composition in a recipe, significantly influences the performance of MEMS devices, thereby underscoring the potential for innovation across various technological disciplines.
Boggadi et al. (Wed,) studied this question.