Microsecond pulsed glow discharge mass spectrometry stripping combined with three-dimensional crater profilometry - a new method for measuring the thickness of micro- and nano-films

Key Points

• Measuring thickness achieves high precision for micro- and nano-films, allowing detailed material analysis.
• The technique integrates microsecond pulsed glow discharge with three-dimensional profiling, enhancing measurement capabilities.
• Application of this method stands out for its potential in various fields like nanotechnology and materials science.
• Supporting advancements in film characterization techniques, this research highlights the need for better measurement strategies.