The property of plasma actuators to generate an airflow without moving parts gives them the potential to be used as a method of contamination control in low-pressure ultra-clean environments. This work describes and shows a measurement technique—based on deflection of microparticles—for determining the air flow induced by a plasma actuator at low pressures in air. Using this technique, the generated thrust is measured at varying pressures ranging from 1 to 25 mbar and for different electrical powers delivered to the plasma. Simultaneously, the measurement technique proves the capability of using this airflow to deflect particles for contamination control purposes; with a thrust up to 7.7±0.4×10−6mNm−1 at 1 mbar and a plasma power of 0.41±0.01 W, we demonstrate that plasma actuators generate enough thrust, even at low pressures, to deflect particles several millimeters on time scales less than a second.
Klaassen et al. (Fri,) studied this question.