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Abstract Rechargeable all‐solid‐state batteries will play a key role in many autonomous devices. Planar solid‐state thin film batteries are rapidly emerging but reveal several drawbacks, such as a relatively low energy density and the use of highly reactive metallic lithium. In order to overcome these limitations a new 3D‐integrated all‐solid‐state battery concept with significantly increased surface area is presented. By depositing the active battery materials into high‐aspect ratio structures etched in, for example silicon, 3D‐integrated all‐solid‐state batteries are calculated to reach a much higher energy density. Additionally, by adopting novel high‐energy dense Li‐intercalation materials the use of metallic Lithium can be avoided. Sputtered Ta, TaN and TiN films have been investigated as potential Li‐diffusion barrier materials. TiN combines a very low response towards ionic Lithium and a high electronic conductivity. Additionally, thin film poly‐Si anodes have been electrochemically characterized with respect to their thermodynamic and kinetic Li‐intercalation properties and cycle life. The Butler‐Vollmer relationship was successfully applied, indicating favorable electrochemical charge transfer kinetics and solid‐state diffusion. Advantageously, these new Li‐intercalation anode materials were found to combine an extremely high energy density with fast rate capability, enabling future 3D‐integrated all‐solid‐state batteries.
Baggetto et al. (Mon,) studied this question.