An 0.8#181;m CMOS technology for high performance logic applications

This paper reports on the process architecture and results of an 0.8µm 5V CMOS logic technology. The process, which is a factor of two faster than current 1.2µm CMOS technology, features seven optically patterned levels with 0.8µm geometries: isolation, gates, contacts, vias, TiN local interconnect (LI), and two metal levels.