Fan-beam steering device using a photonic crystal slow-light waveguide with surface diffraction grating

Compact non-mechanical beam steering devices are desired not only for current common applications, but also for advanced applications such as light detection and ranging. We use a Si photonic crystal slow-light waveguide with a diffraction grating, which radiates the guided mode to free space and steers a fan beam by sweeping the wavelength. Due to its large angular dispersion, slow light enhances the steering range without degrading the beam quality, resulting in more resolution points. We fabricated 600 μm devices and observed a 23° steering range and a beam divergence of 0.23°, which resulted in 100 resolution points.