Low power thermoelectric generator-self-sufficient energy supply for micro systems

New micro and sensor systems are being rapidly developed for their application in all technology events in future. The energy consumption of systems incorporated the latest technical advances decreases permanently to the range of only /spl mu/W. For the applications in this low power range (a few 10 /spl mu/W), DTS has developed a new self-sufficient power supply the low power thermoelectric generator. Whereas earlier with the help of MOS processing techniques manufactured thermoelectric generators reached only a /spl mu/W-output, it was now possible to open up the /spl mu/W-performance range on the basis of high effective thermoelectric compound semiconductor thin films, prepared by physical vapour deposition on polyimid substrates. The LPTG of DTS is a small compact thermoelectric device, full hybrid compatible with micro electronic and micro matched systems. Essential information about the LPTG device properties are given.