Key points are not available for this paper at this time.
Emission spectra generated during the excimer laser ablation of the high-temperature superconductor YBa2Cu3O7 at 193 nm are presented. The feasibility of using this emission as a signal source for a thin-film deposition process monitor is discussed. Results indicate the formation of a partially ionized plasma above the target surface.
Wayne A. Weimer (1988) studied this question.