Gas Sensors Based on Tin Oxide Nanoparticles Synthesized from a Mini‐Arc Plasma Source

Miniaturized gas sensors or electronic noses to rapidly detect and differentiate trace amount of chemical agents are extremely attractive. In this paper, we report on the fabrication and characterization of a functional tin oxide nanoparticle gas sensor. Tin oxide nanoparticles are first synthesized using a convenient and low‐cost mini‐arc plasma source. The nanoparticle size distribution is measured online using a scanning electrical mobility spectrometer (SEMS). The product nanoparticles are analyzed ex‐situ by high resolution transmission electron microscopy (HRTEM) for morphology and defects, energy dispersive X‐ray (EDX) spectroscopy for elemental composition, electron diffraction for crystal structure, and X‐ray photoelectron spectroscopy (XPS) for surface composition. Nonagglomerated rutile tin oxide (SnO 2 ) nanoparticles as small as a few nm have been produced. Larger particles bear a core‐shell structure with a metallic core and an oxide shell. The nanoparticles are then assembled onto an e‐beam lithographically patterned interdigitated electrode using electrostatic force to fabricate the gas sensor. The nanoparticle sensor exhibits a fast response and a good sensitivity when exposed to 100 ppm ethanol vapor in air.