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Abstract Industrial ozone generation uses a special high pressure, low temperature electrical discharge which is referred to as the dielectric barrier discharge or silent discharge. The filamentary structure of this discharge and the properties of individual microdischarges are discussed. The main reaction paths for the excited atomic and molecular species in oxygen and air are identified. Possible approaches to obtain high power densities, high ozone generating efficiencies or high ozone concentrations are discussed.
Kogelschatz et al. (Thu,) studied this question.