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August 7, 2014ACS Macro Letters55 citations

Photopatternable Interfaces for Block Copolymer Lithography

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MMMichael J. MaherMitchell CollegeCBChristopher M. BatesUniversity of California SystemGBGregory BlachutThe University of Texas at Austin

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Abstract

Directly photopatternable interfaces are introduced that facilitate two-dimensional spatial control of block copolymer (BCP) orientation in thin films. Copolymers containing an acid labile monomer were synthesized, formulated with a photoacid generator (PAG), and coated to create grafted surface treatments (GSTs). These as-cast GST films are either inherently neutral or preferential (but not both) to lamella-forming poly(styrene- block -trimethylsilylstyrene) (PS- b -PTMSS). Subsequent contact printing and baking produced GSTs with submicron chemically patterned gratings. The catalytic reaction of the photoacid generated in the UV-exposed regions of the GSTs changed the interfacial interactions between the BCP and the GST in one of two ways: from neutral to preferential (“N2P”) or preferential to neutral (“P2N”). When PS- b -PTMSS was thermally annealed between a chemically patterned GST and a top coat, alternating regions of perpendicular and parallel BCP lamellae were formed.

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Cite This Study

Maher et al. (2014) studied this question.

synapsesocial.com/papers/6a95369657dad826d8f59791https://doi.org/10.1021/mz500370r
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