Abstract We are developing Microwave Kinetic Inductance Detectors (MKIDs) on Lithium Niobate (LN) substrates. The goal of this research is to realize phonon-mediated superconducting detectors with the high phonon collection efficiency. As a first step, we designed and fabricated MKIDs on LN. The relative permittivity of LN was experimentally obtained at 150 mK, and the resonant peaks of MKIDs on LN were observed. The values of internal quality factor on LN were about 10 3 times lower than those on Si. This is primarily attributed to the energy dissipation associated with the generation of bulk acoustic waves within LN. From the reproduction of the observed spectral features in the microwave region, the upper limit of the quality factor due to the loss from piezoelectricity was estimated, that was consistent with the observed values.
Ito et al. (Tue,) studied this question.
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