The impact of micro-vibrations on the METIS instrument

The Mid-infrared ELT Imager and Spectrograph (METIS) is one of the first-light scientific instruments for the ELT with over 75 optical components. The science cases of METIS impose tight stability requirements on the optical performance. To assess whether the optical performance is harmed by micro-vibrations, the effect of numerous vibration sources on the optical stability are analyzed. We present the analysis approach and results for METIS. This includes finite element analysis to obtain transfer functions, compute rigid body motion response of optical elements and assess the optical impact by ray-tracing.