Wavefront Reconstruction Based on Multi-directional Orthogonal Lateral Shearing Interferometry

Abstract The shear wavefront in a single direction, which has the phase deviation of the missing orthogonal direction in the interference pattern, there are the limitation of phase sampling points on the shear direction, it has a certain impact on achieving high spatial resolution in wavefront reconstruction. To achieve high-precision wavefront reconstruction of more sampled data in multi-orthogonal shear directions. In our investigation, a wavefront reconstruction method based on multi-directional orthogonal lateral shearing interferometry was studied. By establishing a relationship model corresponding to multi-directional differential wavefront and differential Zernike polynomials, the principle of wavefront reconstruction based on differential Zernike polynomials, a wavefront reconstruction method for multi-directional orthogonal lateral shearing interferometry is proposed. Firstly, the effectiveness of multi-directional orthogonal shearing interferometry wavefront reconstruction was verified by simulation research. Then, a mathematical model for multi-directional orthogonal lateral shearing interferometry of wavefront testing was established. Finally, the measurement verification of actual experimental that the spherical wavefront was carried out, by comparing the repeatability measurement with the measurement results of the ZYGO interferometer, the relative measurement error precision of RMS was better than 0.01λ. OCIS codes: (120.3180) Interferometry; (230.0230) Optical devices; (120.3940) Metrology; (120.5050) Phase measurement.