May 15, 2024

Heterodyne lateral shearing interferometer for measuring the form and mid-spatial frequency of aspheric test surfaces

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Resumen

We demonstrate a spatial shearing, heterodyne interferometer for measuring aspheres with high dynamic range, high sensitivity, and low susceptibility to environmental fluctuations. Form and mid-spatial frequency are measured rapidly and accurately without a null.

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Goodwin et al. (Wed,) studied this question.

synapsesocial.com/papers/68e6a135b6db643587624773 https://doi.org/https://doi.org/10.1117/12.2692550

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