A Composite High-Speed and High-Precision Positioning Approach for Dual-Drive Gantry Stage

As an important part of the motion system in high-end manufacturing equipment, dual-drive gantry stage urgently requires higher performance. Planar rapid positioning is a classical application of the gantry stage, while unmodeled dynamics, coupled dynamics of mechanism, and conflict between rapidity and precision bring many difficulties into controller design. In this article, a coupled dynamic model is established and transformed for positioning to provide better guidance for controller design under the rotation mode of the cross beam. A composite positioning control method consisting of a high-speed moving section and a high-precision positioning section is proposed for linearmotors on the gantry to achieve both fast response and precise control simultaneously. In addition, a synchronization scheme is proposed for the dual-driven cross beam with coupled dynamics to enhance the positioning precision of the workbench and balance of the beam. Experiments are conducted on the X -axis with one linearmotor for the composite positioning method and Y -axis with two linearmotors for the synchronization scheme combined with the composite positioning control separately, through which the effectiveness and validity of the proposed method are verified. Note to Practitioners —Planar positioning of dual-drive gantry stage is a significant technical problem in industrial applications, which pursues the ultimate speed and precision performance. In this paper, a dynamic model with rotational mode is established and transformed for positioning in an intuitive way. In addition, a composite positioning method is proposed for linearmotors on the stage to achieve high-speed and high-precision performance in the case of common nonlinear dynamics and disturbances. And then, to achieve high positioning performance of the cross beam while maintaining the balance, a synchronous scheme incorporated with the composite positioning method is presented, based on the transformed model. In industrial scenarios, the proposed method is very practical since a precise, rapid and stable point-to-point planar motion can be obtained only with conventional dynamic models and parameters, and it is crucial for production efficiency and quality.