Crystalline germanium high-Q microresonators for mid-IR

High-quality-factor optical microresonators have become an appealing object for numerous applications. However, the mid-infrared band experiences a lack of applicable materials for nonlinear photonics. Crystalline germanium demonstrates attractive material properties such as high nonlinear refractive index, large transparency window including the mid-IR band, particularly long wave multiphonon absorption limit. Nevertheless, the reported optical losses in germanium microresonators might not allow the potential of the Ge-based devices to be revealed. In this study, we report the fabrication of germanium microresonators with radii of 1.35 and 1.5 mm, exhibiting exceptional quality factors (Q-factors) exceeding 20 million, approaching the absorption-limited values at a wavelength of 2.68 µm. These Q-factors are a hundred times higher than previously reported, to the best of our knowledge. We measured the two-photon absorption coefficient combined with free-carrier absorption leveraging the high-Q of the resonators (obtained β TPA = (0.71 ± 0.12) · 10 −8 m/W at 2.68 µm). This research underscores the potential of whispering gallery mode microresonators as valuable tools for measuring absorption coefficients at different wavelengths, providing a comprehensive analysis of various loss mechanisms. Furthermore, the exceptional Q-factors observed in germanium microresonators open intriguing opportunities for the advancement of germanium-based photonics within the mid-infrared spectral band.