Research on the technology of quickly removing subsurface damage of hard and brittle optical elements

For applications such as inertial confinement fusion and remote imaging detection, optical components need to meet the requirements of ultra smooth and low loss, and their manufacturing methods must meet the requirements of eliminating surface defects and subsurface damage. This paper mainly studies a polishing method for large-diameter optical components, which combines classical polishing with equal vacuum ionization polishing to balance polishing efficiency and removal of damaged layers. The idea of combined polishing can be extended to the comprehensive application of various polishing methods.