What question did this study set out to answer?

This research aims to develop a new technique for measuring the characteristics of periodic nanostructures.

February 5, 2026

High Harmonic Generation driven Extreme Ultraviolet 0

Puntos clave

This research aims to develop a new technique for measuring the characteristics of periodic nanostructures.
Introduced a high harmonic generation (HHG) scatterometry technique.
Utilized grazing incidence reflection scatterometry for measurements.
Focused on extracting linewidth and groove height.
Achieved linewidth measurement precision of 20 nm.
Obtained groove height measurement precision of 2 nm.
Demonstrated potential for application in ultrafast spectroscopy on layered structures.

Resumen

We introduce a tabletop high harmonic generation (HHG) scatterometry technique to extract structural and material characteristics of periodic nanostructures. Grazing incidence reflection scatterometry enables fast and robust measurements of linewidth and groove height with 20 nm and 2 nm precision respectively, paving the way for ultrafast spectroscopy on layered heterostructures.

Preguntar a la IA

Me gusta

Guardar

Cite This Study

Corazza et al. (Mon,) studied this question.

synapsesocial.com/papers/6984343ff1d9ada3c1fb225b https://doi.org/https://doi.org/10.1051/epjconf/202533503020/pdf

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

Preguntar a la IA

Me gusta

Guardar