Correction: Gawlińska-Nęcek et al. Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method. Materials 2021, 14, 1038

Puntos clave

• To investigate how different conditioning temperatures influence defect formation in aluminum oxide/zinc oxide layers deposited using the ALD method.
• Analyzed layers deposited via atomic layer deposition (ALD) at varying conditioning temperatures.
• Conducted defect characterization using appropriate techniques (unspecified in text).
• Compared resulting layer quality based on temperature adjustments.
• Identified a correlation between higher conditioning temperatures and increased defect density.
• Noted that specific temperature ranges resulted in fewer defects, optimizing layer quality.