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The characterization of surface and thin film morphologies and roughnesses significantly benefits from appropriately utilizing different measuring techniques. When suitably combining light scattering measurements, scanning force microscopy, and white fight interferometry, comprehensive characterization over a wide range of sample types and roughness scales can be accomplished A concise overview on the characterization techniques is given, followed by examples of combined measurements. The presented results include a variety of samples such as superpolished and microrough substrates, thin film coatings for applications from the visible to the deep ultraviolet region, and rough engineering surfaces.
Duparré et al. (Mon,) studied this question.