Reduction of debris of a CO2 laser-produced Sn plasma extreme ultraviolet source using a magnetic field

We demonstrated a fivefold reduction in Sn debris deposited on small Mo∕Si multilayer mirrors from a Sn planar target by applying a static magnetic field of 1T. The debris reduction is attributed to the decrease of more than three orders in the number of ions that reach the sample mirror due to their interaction with the applied magnetic field that guides the ions away from the mirror. The remaining deposition is due to neutral Sn atoms that do not interact with the applied magnetic field.