Detection limits in XPS for more than 6000 binary systems using Al and Mg Kα X‐rays

A simple approach to estimating the detection limits of X‐ray photoelectron spectroscopy (XPS) for any element in any elemental matrix is presented, using the intensity of the background at the expected position for the photoelectron peak to be detected. The approach has been extended to estimate the detection limit for all elements from lithium to bismuth in a similar range of elemental matrices. Using a number of assumptions, it is possible to obtain a reasonable estimate of the background intensity at any electron kinetic energy in the XPS spectrum of an element. Therefore, a detection limit for an arbitrary element homogeneously distributed in that matrix can be estimated. The results show that, although most elements are detectable at about the 1 at.% to 0.1 at.% level, for heavy elements in a light element matrix, the detection limit can be better than 0.01 at.%, whereas for light elements in a heavy element matrix, detection limits above 10 at.% are not uncommon. Two charts detailing the detection limits for all combinations of trace and matrix elements from lithium ( Z = 3) to bismuth ( Z = 83) are provided for Al Kα and Mg Kα X‐ray sources using a typical hemispherical analyser instrument which provides 10 6 counts eV for the Ag 3d 5/2 peak from pure silver. These detection limits can be scaled to estimate the detection limits for any given instrument and operating conditions if the intensity of the Ag 3d 5/2 peak from pure silver under those conditions is known. © 2014 Crown Copyright. Surface and Interface Analysis © 2014 John Wiley & Sons Ltd.