Laser cutting and engraving are effective techniques that use lasers to cut, score, and engrave materials. This technology is widely applied across various fields - from research to industry - for micro-manufacturing, thanks to its diverse processing capabilities and material flexibility at the micro-scale level. One of the primary functions of a laser device is to create miniature structures, such as microfluidic devices, with high-quality finishes and precise kerf dimensions. Therefore, controlling the engraving process during the production of microchannels is essential. This paper investigates the use of CO₂ laser cutting and engraving on polymethyl methacrylate (PMMA, commonly known as acrylic) substrates as a versatile and rapid method for fabricating microfluidic devices. The effects of input laser parameters on groove quality were examined. More than forty grooves were etched onto 5 mm-thick acrylic substrates using 14 combinations of laser speed and power levels set at 5% and 15%. The results of this study provide insight into the optimal parameters for laser micromachining of acrylic materials.
Huyen Bui (Mon,) studied this question.