MEMS‐based nanoreactor for in situ analysis of solid–gas interactions inside the transmission electron microscope

A nanoreactor‐based system for in situ analysis of solid–gas interactions inside the transmission electron microscope, referred to as the ‘climate system’, is introduced here. The latter uses an micro‐electro mechanical systems (MEMS)‐based device as a multi‐functional sample carrier and microsized laboratory for simultaneous heating and gas experiments. To assemble the nanoreactor, two chips are sandwiched together to form a minimised chemical reaction chamber. The bottom chip contains a four‐point‐probe microheater, which controls and introduces the heating environment (up to 1300°C) around the sample. Similarly, it contains the spacers that define the height of the gas chamber. The top chip confines the gas in the microchamber while isolating it from the external environment. Both chips contain electron transparent windows that allow the electron beam to pass through for in situ imaging. The sample can be deposited or prepared directly on the windows, which are made of silicon nitride and can sustain pressures up to 1.5 bar and high temperatures while ensuring low background atomic resolution imaging.