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Piezoelectric MEMS microphones have been researched for more than 30 years. Despite many advantages, they have not seen widespread use because the signal-to-noise ratio (SNR) has been poor relative to capacitive MEMS microphones. This work describes piezoelectric MEMS microphones, utilizing aluminum nitride as a piezoelectric material, with a better SNR than many capacitive MEMS microphones on the market today. Further, this work describes and measures the noise sources in these microphones. Piezoelectric MEMS microphones with an SNR of 66 dB and 68 dB are presented.
Littrell et al. (Thu,) studied this question.
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