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January 1, 2009

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Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications

LWLei WuQinghai University Affiliated Hospital HXHuikai XieBeijing Institute of Technology

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Resumen

Electrothermally-actuated MEMS mirrors with large apertures of 6 mm and 10 mm are reported. Optical scan above 10deg, divergence below 0.53 mrad and resonance frequencies in the order of 100 Hz have been achieved.

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Wu et al. (Thu,) studied this question.

synapsesocial.com/papers/6a156d4c79ff98d0de4e9ea3 https://doi.org/https://doi.org/10.1109/omems.2009.5338553

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Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications | Synapse

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