Integrated Capillary Electrophoresis Devices with an Efficient Postcolumn Reactor in Planar Quartz and Glass Chips

Methods to fabricate planar capillary electrophoresis devices integrated with a postcolumn reactor in fused silica (quartz) and Pyrex glass are presented. Quartz is etched at ∼1 μm/min with a 2.1:1 width-to-depth ratio using a Cr/Au/Cr metal mask and concentrated HF/HNO(3). On-chip postcolumn reaction of o-phthaldialdehyde (OPA) and amino acids gave theoretical plate numbers up to 83 000 and ∼90 ms peak widths, corresponding to 14 plates/V and a 0.5 μm theoretical plate height. The reactor geometry caused only a 10% degradation in efficiency.