High-resolution multigas sensors based on solid state resonant cavities

A new sensor is proposed combining arrays of interference filters with resonant cavities of high interference order (Fabry-Perot resonators) using both, high capabilities of accurate thickness control in silicon substrates derived from microelectronics and thin-film optics techniques. The interest of this type of device would be the fabrication of high resolution multigas sensors, compact, with no moving parts, for accurate measurement of low concentration gases.