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Ion beam finishing technology for high precision optics production | Synapse

January 1, 2002

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Ion beam finishing technology for high precision optics production

ASAxel SchindlerLeibniz Institute of Surface Engineering THT. HänselTechnische Universität Ilmenau FFFrank FrostLeibniz Institute of Surface Engineering

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Resumen

A new company-Nanotechnologie Leipzig GmbH - NTGL - is now offering ion beam figuring production equipment including the technology for high precision optics finishing for customized solutions.A prototype ion beam figuring (IBF) plant “UPFA-1” mature for optics production requirements has been developed and established in the R&D application and service lab of the IOM institute.A dwell time algorithm based local ion beam etching technology using a Gaussian shaped beam density profile is used for the local surface shape correction of optical elements.

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Cite This Study

Schindler et al. (Tue,) studied this question.

synapsesocial.com/papers/6a2235d61b095894fc4edcd5 https://doi.org/https://doi.org/10.1364/oft.2002.otub5