Performance enhancement for the triboelectric energy harvester by using interfacial micro-dome array structures

Interfacial micro-dome array structures are proposed to enhance the performance of triboelectric energy harvester (TEH) devices. With the designed process flow for the demonstration of the interfacial micro-dome array structures, open-circuit voltage (Voc) is found to be improved about 2 times compared with the previously reported micro-pyramid array TEH device. The modeling, simulation, visualization experiment, and electrical measurements are conducted and analyzed to clarify the impact of the different interfacial microarray structures in the TEH devices. We conclude that the proposed micro-dome array TEH device indeed can result in the best output power density, Voc, pressure sensing sensitivity, and pressure sensing range.