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July 31, 2026Photonics0 citationsOpen Access

Research Progress in Design and Fabrication of Convex Blazed Grating

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MYMingliang YaoYLYinnian LiuPZPengfei Zhao

Key Points

  • The aim is to review the design and fabrication advancements of convex blazed gratings in spectrometry.
  • Systematic review of design theory from scalar diffraction to rigorous vector methods.
  • Survey of fabrication techniques including mechanical ruling, holographic ion beam etching, and electron beam lithography.
  • Comparative analysis of methods regarding precision and operational capabilities.
  • Recent breakthroughs in electron beam lithography achieved diffraction efficiency exceeding 80%.
  • Successful applications of convex blazed gratings in aerospace engineering projects.
  • Identified challenges include fabrication uniformity on curved substrates and the need for large-area manufacturing.

Abstract

The convex blazed grating is a key dispersive component in high-performance spectrometers, offering advantages such as a broad operating wavelength range, uniform dispersion, high diffraction efficiency, and the ability to achieve a large field of view. With the popularization of spectral detection technology and the ever-increasing demand for specialization, its design and fabrication technologies have drawn considerable attention in the field. This paper systematically reviews the development history of convex blazed grating design theory, from early scalar diffraction theory to the current mainstream rigorous vector methods, including rigorous coupled-wave analysis (RCWA), the finite-difference time-domain (FDTD) method, and commercial software such as Gsolver and PCGrate, and summarizes the applicable scenarios and limitations of each method. In terms of fabrication techniques, we comprehensively survey three typical technology routes—mechanical ruling, holographic ion beam etching, and electron beam lithography—covering their principles and progress, and analyze their respective merits and drawbacks in terms of precision, operating waveband, groove profile flexibility, and production capacity through comparative analysis. On this basis, we highlight recent breakthroughs achieved via electron beam lithography in blaze angle control and high-aspect-ratio etching for convex blazed gratings spanning from the ultraviolet to the very-long-wave infrared band; the diffraction efficiency has exceeded 80%, and such gratings have been successfully applied in aerospace engineering projects. Finally, this paper summarizes the current challenges facing convex blazed grating technology and provides an outlook on future development trends, including fabrication uniformity on curved substrates, large-area high-precision manufacturing, and design–process co-optimization, with the aim of offering a systematic reference for researchers and engineers in related fields.

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Cite This Study

Yao et al. (2026) studied this question.

synapsesocial.com/papers/6a6c479e747664a1aa73d408https://doi.org/10.3390/photonics13080713
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