The evolution of silicon integrated circuit technologyfrom scaling to lower power consumption

With the rapid development of silicon-based microelectronics industry, the silicon-based microelectronics industry are reaching a point where microelectronics can no longer simply scaled to increasingly small sizes, and power consumption controlling are becoming increasingly important. The article starts from the early development of silicon integrated circuit and addresses how the focus transferred from scaling to scaling to lower power consumption. Based on that, the article makes a systematic review of all the technologies of contributing to lower power consumption, from designing to manufacturing, from architecture to circuit level. The article also introduces new devices and architectures adapting 3D integrated circuit and stacking technology as well as the FE-FET transistor and FE-RAM. Meanwhile, the development of lithography technology is also discussed. And a brief outlook on the future development of silicon integrated circuit technology is given.