Research on an Active Adjustment Mechanism Based on Non-Singular Terminal Sliding Mode and Finite-Time Disturbance Observer

With the continuous development of synchrotron radiation light sources, higher requirements have been put forward for the stability of double-crystal monochromators in synchrotron radiation facilities. This paper designs an active adjustment mechanism for a double-crystal monochromator to improve its stability. Firstly, three spatial degrees of freedom are designed based on the active adjustment mechanism of flexible leaf spring parallel coupling, and the prototype of the mechanism is fabricated. Secondly, system identification experiments are carried out and the system transfer function curve is fitted by the nonlinear least squares method. Thirdly, the controller based on non-singular terminal sliding modes and a finite-time disturbance observer was designed for stability control and disturbance compensation. Finally, the effectiveness of the controller is verified by a model-in-the-loop approach based on the performance of the real-time target machine. The results show that the non-singular terminal sliding mode + finite-time disturbance observer control strategy can reduce the RMS value of the vibration displacement of Axis-1/Axis-2/Axis-3 by 81.25%, 78.53%, and 71.82%.