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Abstract The research of macro and micro motion platforms has always been committed to realizing the ultra-high acceleration operation of the platform and improving the positioning accuracy of the platform. With the goal of achieving ultra-high-speed, the impact of the increase in speed on key components has also attracted more and more attention. This paper takes a flexible positioning platform of an ultra-high acceleration macro–micro motion platform with adjustable voice coil motor (VCM) number and load as the research object. Perform static analysis, rigid-flexible coupled dynamic analysis, fatigue analysis, and multi-objective response surface optimization design (RSMD). The influence on the acceleration of the platform and the influence on the stress and fatigue life of the flexible positioning platform with the change of the number and load of the VCM were explored. The changes of the acceleration and speed curves of the platform during ultra-high-speed operation are obtained by dynamic analysis, and the position of the dangerous part of the flexible platform during operation is obtained. Finally, the RSMD is carried out to realize its performance optimization. The research conclusions of this paper have great reference value for the development of the macro–micro motion platform and the improvement of its structure.
Zhang et al. (Fri,) studied this question.