Thermal annealing of Nb2O5 and Ta2O5 thin films for CMOS based chemical sensors

Key Points

• Chemical sensors exhibited increased sensitivity with thermal annealing of niobium pentoxide and tantalum pentoxide thin films.
• Results showed a notable improvement in sensor response times, with average enhancements measured at over 50%.
• Analysis includes temperature-dependent properties evaluated across various compositions of thin films.
• Improvement metrics hinge on initial material properties, highlighting the influence of the annealing process.