Reliability evaluation of MEMS scanning mirrors with an embedded mirror-monitoring sensor under external random vibrations

Key Points

• MEMS scanning mirrors exhibit variable reliability when exposed to external random vibrations, impacting performance.
• Evidence shows a significant drop in performance metrics during high-intensity vibration conditions, suggesting vulnerability.
• Evaluation of mirror reliability focused on the impact of external random vibrations using an embedded monitoring sensor for real-time assessment.
• These findings highlight the need for further research into improving MEMS design to ensure better reliability in dynamic environments.