3D Temperature Field Simulation of Physical Vapor Transport for Aluminum Nitride Crystal Growth Based on an Inverse Algorithm

This study presents a 3D thermal field simulation of aluminum nitride (AlN) physical vapor transport (PVT) process based on Simdroid, the general-purpose multiphysics simulation software. The electromagnetic simulation was conducted to determine the Joule heating distribution using FEM, after which the temperature distribution of the growth system was calculated with the thermal module of the software. The radiation heat transfer was calculated by the view factor method, considering only the surface-to-surface radiation. Additionally, an inverse algorithm was adopted to determine the required power inputs given specified temperature constraints. This simulation process is now seamlessly integrated into the Simdroid, which allows for the convenient simulation of PVT process. The established methodology provides an effective numerical tool for optimizing PVT process parameters, particularly in addressing the dimensional limitations inherent in conventional 2D simulations. This study provides the validation of Simdroid's applicability in PVT thermal design through coupled electromagnetic-thermal simulation, with the separately discussed framework to mass transport, growth kinetics, and thermal stress analysis for PVT process optimization.