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A microrobot with an external skeleton like that of an insect is proposed. The microrobot can be implemented using rigid plates and elastic joints. A large scale model consisting of plastic plates, springs and solenoids is shown to demonstrate its motion. Several microsized models have been built on silicon wafers, using polysilicon as rigid plates and polyimide as elastic joints.>
Shimoyama et al. (1993) studied this question.
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