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A one-dimensional near-field scanning optical microscope (NSOM) operating in the fluorescence mode has been demonstrated. NSOM line scans of both metallic edges and fluorescent gratings have been obtained and quantitatively compared to both scanning electron micrographs and conventional optical micrographs of the same structures. The sharpness of the near-field scans indicates resolution of 100 nm.
Harootunian et al. (1986) studied this question.