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October 18, 2004Applied Physics Letters79 citations

High-Q ring resonators in thin silicon-on-insulator

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TBTom Baehr‐JonesPatrick Henry CollegeMHMichael HochbergUniversity of WashingtonCWC. K. WalkerUniversity of Arizona

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Abstract

We have fabricated high-Q microrings from thin silicon-on-insulater SOI layers and measured Q values of 45 000 in these rings, which were then improved to 57 000 by adding a PMMA cladding. The optimal waveguide designs were calculated, and the waveguide losses were analyzed. These high-Q resonators are expected to lead to interesting devices for telecommunication filters and sources as well as optical refractive index sensing.

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Baehr‐Jones et al. (2004) studied this question.

synapsesocial.com/papers/6a6c1f9b47a1bfb288f36a01https://doi.org/10.1063/1.1781355
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