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February 15, 1993Physical Review Letters223 citations

Growth morphology and the equilibrium shape: The role of ‘‘surfactants’’ in Ge/Si island formation

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DED. J. EagleshamFUF. C. UnterwaldDJD. C. Jacobson

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Abstract

Surface energy anisotropy, as opposed to surface energy, is shown to influence change of growth mode in Ge/Si by ``surfactant'' impurities. By annealing thin Ge/Si films, we find the equilibrium island shape, and hence the surface energy anisotropy; radical changes in shape are seen for impurity-terminated surfaces: Ge: Sb enhances (100) facets compared to clean Ge and Ge: In favors 311. Thus Sb impurities favor large flat islands which would lead to earlier island coalescence and can aid planar (100) growth, while In (though otherwise a good ``surfactant'') leaves the film faceted. Island suppression by a ``morphactant'' thus depends on enhanced faceting onto (100), as well as reduced diffusion.

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Cite This Study

Eaglesham et al. (1993) studied this question.

synapsesocial.com/papers/6a893eb78371e1a748c979fdhttps://doi.org/10.1103/physrevlett.70.966
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