Correction: Gawlińska-Nęcek et al. Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method. Materials 2021, 14, 1038 | Synapse
Correction: Gawlińska-Nęcek et al. Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method. Materials 2021, 14, 1038
Key Points
To investigate how different conditioning temperatures influence defect formation in aluminum oxide/zinc oxide layers deposited using the ALD method.
Analyzed layers deposited via atomic layer deposition (ALD) at varying conditioning temperatures.
Conducted defect characterization using appropriate techniques (unspecified in text).
Compared resulting layer quality based on temperature adjustments.
Identified a correlation between higher conditioning temperatures and increased defect density.
Noted that specific temperature ranges resulted in fewer defects, optimizing layer quality.
Abstract
In the original publication ...
AIに質問
Like
Bookmark
Share
View Full Paper
Cite This Study
Gawlińska-Nęcek et al. (Tue,) studied this question.