The paper presents experimental and calculated data on the implantation of hydrogen ions with an energy of 5 keV into single-crystal samples of synthetic quartz and olivine. It has been experimentally shown that when irradiated with hydrogen molecules with an energy of 5 keV and a dose of 5 10^15 ion/cm ^2, the implantation depth of hydrogen ions is 810 and 620 for quartz and olivine, respectively. Taking into account hydrogen beam spraying, these results are in good agreement with calculation performed using SRIM software package reported here and data reported previously.
Klyueva et al. (Mon,) studied this question.