MEMS hydrophones, as critical sensors for maritime security and underwater information acquisition, have sensitive membrane structures that exhibit insufficient ability to withstand hydrostatic pressure, necessitating an overload-protection design. Based on buckling stability theory, a collaborative optimization method for overload-protection column design was proposed, integrating theoretical analysis, finite-element simulation, and process feasibility. An optimized design scheme for hydrophone overload-protection columns was established by comprehensively considering geometric buckling-resistant design, micro-gap anti-adhesion requirements, minimal impact on sensitivity, and micro/nano-fabrication constraints. The results indicate that intermediate slenderness columns with radii between 5.5 μm and 7.5 μm sufficiently meet both fabrication and operational requirements, effectively providing overload protection. Furthermore, at water depths not exceeding 382 m, the MEMS hydrophone can maintain the integrity of its membrane structure without column buckling.
Ren et al. (Mon,) studied this question.