Key points are not available for this paper at this time.
A new company-Nanotechnologie Leipzig GmbH - NTGL - is now offering ion beam figuring production equipment including the technology for high precision optics finishing for customized solutions.A prototype ion beam figuring (IBF) plant “UPFA-1” mature for optics production requirements has been developed and established in the R&D application and service lab of the IOM institute.A dwell time algorithm based local ion beam etching technology using a Gaussian shaped beam density profile is used for the local surface shape correction of optical elements.
Schindler et al. (Tue,) studied this question.